The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Nov. 18, 2020
Vat Holding Ag, Haag, CH;
Alejandro Marzinotto, Sennwald, CH;
Adrian Eschenmoser, Werdenberg, CH;
Andreas Hofer, Chur, CH;
Frantisek Balon, Sevelen, CH;
Michael Zickar, Goldach, CH;
VAT HOLDING AG, Haag, CH;
Abstract
Method for monitoring a state of a pin lifter device (), wherein the pin lifter device () is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device () has a coupling () and a drive unit () having an electric motor, which is designed and interacts with the coupling () in such a way that the coupling () is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.