The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2024

Filed:

Feb. 02, 2024
Applicant:

Inficon Ag, Balzers, LI;

Inventors:

Urs Wälchli, Chur, CH;

Stefan Kaiser, Ruggell, LI;

Bernhard Andreaus, Rapperswil, CH;

Martin Wüest, Malans, CH;

Astrid Waldner, Bad Ragaz, CH;

Michael Trefzer, Ruggell, LI;

Assignee:

INFICON AG, Balzers, LI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 41/10 (2006.01); G01L 21/30 (2006.01); H01J 41/02 (2006.01);
U.S. Cl.
CPC ...
H01J 41/10 (2013.01); G01L 21/30 (2013.01); H01J 41/02 (2013.01);
Abstract

Chamber () for bounding a plasma generation area () in a vacuum pressure sensor (), wherein the chamber comprises an electrically conductive casing element (″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (), through which the central axis extends, wherein the casing element comprises at least a first (B) and a second region (B), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.


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