The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2024

Filed:

Jun. 11, 2020
Applicant:

The University of Tokyo, Tokyo, JP;

Inventors:

Naoya Shibata, Tokyo, JP;

Takehito Seki, Tokyo, JP;

Kousuke Ooe, Tokyo, JP;

Yuichi Ikuhara, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/24 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/263 (2013.01); H01J 37/265 (2013.01); H01J 2237/223 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/2802 (2013.01);
Abstract

An observation method using a scanning transmission electron microscope for scanning an electron beam over a specimen and detecting electrons transmitted through the specimen includes: acquiring results of detecting the electrons transmitted through the specimen using a segmented detector having detection regions disposed in a bright-field area; and generating segmented images based on the results of detecting the electrons in the detection regions, and applying filters determined based on a signal-to-noise ratio to the segmented images to generate a reconstructed image. The signal-to-noise ratio is proportional to an absolute value of a total phase contrast transfer function normalized by a noise level, the total phase contrast transfer function being defined by product-sum operation of phase contrast transfer functions expressed by complex numbers and weight coefficients for the detection regions. The filters for the detection regions are determined based on the weight coefficients that yield a maximum of the signal-to-noise ratio.


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