The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Oct. 22, 2021
Horiba Stec, Co., Ltd., Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A flow rate ratio control device smoothly switches branches without generating abrupt changes in the flow rates of a fluid flowing therethrough. The device includes at least two branches from a main flow path, first and second fluid control valves each including a position sensor for a valve body, a storage unit that stores reference positions of the valve bodies in order to divide the fluid flowing into the branches at predetermined ratios, and a control unit that controls the ratios of the branches by performing position control to place the valve body of the first valve in the reference position, and by performing flow rate control to set the flow rate of the second valve to a target flow rate. When the valve body of the second valve reaches the reference position, the control unit switches the position control and flow rate control between the valves.