The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Jun. 22, 2021
Flusso Limited, Cambridgeshire, GB;
Florin Udrea, Cambridgeshire, GB;
Syed Zeeshan Ali, Cambridgeshire, GB;
Ethan Gardner, Warwickshire, GB;
Jonathan Owen Hardie, Cambridgeshire, GB;
Jonathan Sean Callan, Cambridgeshire, GB;
Flusso Limited, Cambridgeshire, GB;
Abstract
We disclose herein a fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising a semiconductor substrate comprising a first etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, a heating element located within the first dielectric membrane, and a first temperature sensing element spatially separated from the heating element. The fluid sensor further comprises a second temperature sensing element within the dielectric membrane, or the heating element may be further configured to operate as a second temperature sensing element. The separation between the second temperature sensing element and the first temperature sensing element introduces a temperature difference between the second temperature sensing element and the first temperature sensing element, such that a differential signal between the first temperature sensing element and the second temperature sensing element is indicative of the concentration or composition of the fluid based on a thermal conductivity of the fluid.