The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Nov. 23, 2020
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Noriaki Hamaya, Echizen, JP;
Yasushi Takai, Echizen, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/11 (2016.01); C23C 4/02 (2006.01); C23C 4/04 (2006.01); C23C 4/126 (2016.01); C23C 4/134 (2016.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 4/11 (2016.01); C23C 4/02 (2013.01); C23C 4/04 (2013.01); C23C 4/126 (2016.01); C23C 4/134 (2016.01); C23C 28/04 (2013.01); C23C 28/042 (2013.01);
Abstract
An yttrium fluoride sprayed coating having a thickness of 10-500 μm, an oxygen concentration of 1-6 wt %, and a hardness of 350-470 HV is deposited on a substrate surface. The yttrium fluoride sprayed coating exhibits excellent corrosion resistance in a halogen-base gas atmosphere or halogen-base gas plasma atmosphere, functions to protect the substrate from damage by acid penetration during acid cleaning, and minimizes particle generation from a reaction product and due to spall-off from the coating.