The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Nov. 09, 2022
Applicant:
Watlow Electric Manufacturing Company, St. Louis, MO (US);
Inventors:
Sanhong Zhang, Ballwin, MO (US);
Kevin Ptasienski, O'Fallon, MO (US);
Martin Wallinger, Abtenau, AT;
Blake Parkinson, St. Louis, MO (US);
Assignee:
Watlow Electric Manufacturing Company, St. Louis, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C23C 24/04 (2006.01); H05B 3/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C23C 24/04 (2013.01); H05B 3/146 (2013.01);
Abstract
A heating assembly includes a support member for supporting a target thereon, a diffuser layer attached to the support member, and a heater attached to the diffuser layer. The diffuser layer includes discrete diffuser segments separated by gaps. The discrete diffuser segments are made of the same material and are configured to allow a desired thermal gradient to be maintained between the discrete diffuser segments during heating of the target.