The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Jun. 24, 2021
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Haruhiko Tan, Kobe, JP;
Avish Ashok Bharwani, Santa Clara, CA (US);
George Chin, San Leandro, CA (US);
Simon Jeyapalan, Newark, CA (US);
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC., Wixom, MI (US);
Abstract
An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating deviceis rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.