The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
May. 09, 2023
Applicant:
Jsw Aktina System Co., Ltd, Yokohama, JP;
Inventor:
Yuki Suzuki, Yokohama, JP;
Assignee:
JSW AKTINA SYSTEM CO., LTD, Yokohama, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B23K 26/00 (2014.01); B23K 26/08 (2014.01); B23K 26/12 (2014.01); B23K 26/354 (2014.01); B65G 49/05 (2006.01); B65G 49/06 (2006.01); B65G 53/02 (2006.01); C03B 25/02 (2006.01); C03C 17/30 (2006.01); H01L 21/268 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67784 (2013.01); B23K 26/0006 (2013.01); B23K 26/083 (2013.01); B23K 26/12 (2013.01); B23K 26/354 (2015.10); B65G 49/05 (2013.01); B65G 49/065 (2013.01); B65G 53/02 (2013.01); C03B 25/02 (2013.01); C03C 17/30 (2013.01); H01L 21/268 (2013.01); H01L 21/67115 (2013.01); H01L 21/6776 (2013.01); B65G 2249/04 (2013.01); B65G 2249/045 (2013.01); C03C 2218/32 (2013.01);
Abstract
In a laser irradiation apparatusaccording to one embodiment, each of first and second flotation unitsincludes a baseand a porous platebonded to an upper surface of the baseby an adhesive layerthe baseincludes a rising portionprotruding upward at an outer periphery facing at least the gap, and the porous plateincludes a cutout portionconfigured to fit to the rising portionand the adhesive layeris formed along an inner wall of the rising portionhaving fitted to the cutout portion