The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Apr. 26, 2022
Deviceeng Co., Ltd., Chungcheongnam-do, KR;
Taek Youb Lee, Chungcheongnam-do, KR;
DEVICEENG CO., LTD., Chungcheongnam-do, KR;
Abstract
The present invention relates to a substrate edge etching apparatus including: a substrate support assembly having a horizontally rotatable chuck base with a light through hole vertically penetrating a center thereof and chuck pins disposed on top of the chuck base; a spin motor for rotating the substrate support assembly; a purge gas supply assembly connected to the driving shaft through a bearing, extending vertically from the underside center of the chuck base, and having a hollow hole penetratingly extending therealong to supply a purge gas to the light through hole; and a substrate sensing unit having a light transmission part disposed inside the hollow hole of the purge gas supply assembly and a light reception part disposed apart above the light through hole of the chuck base.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile