The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Aug. 14, 2020
Applicants:
SK Innovation Co., Ltd., Seoul, KR;
SK Inc., Seoul, KR;
Inventors:
Cheol Woo Kim, Daejeon, KR;
Kwang Kuk Lee, Daejeon, KR;
Jae Hoon Kwak, Yeongju-si, KR;
Young Bom Kim, Yeongju-si, KR;
Jung Ha Shin, Yeongju-si, KR;
Jong Ho Lee, Yeongju-si, KR;
Jin Kyung Jo, Yeongju-si, KR;
Assignees:
SK Innovation Co., Ltd., Seoul, KR;
SK INC., Seoul, KR;
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/04 (2006.01); C09K 13/06 (2006.01); C09K 13/08 (2006.01); H01L 21/3105 (2006.01); H01L 21/311 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
C09K 13/04 (2013.01); C09K 13/06 (2013.01); C09K 13/08 (2013.01); H01L 21/31053 (2013.01); H01L 21/31111 (2013.01); H01L 21/76224 (2013.01);
Abstract
An etching composition includes phosphoric acid, a silane compound comprising at least one silicon (Si) atom, and an organic phosphate represented by Formula 1 below: