The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Jul. 12, 2019
Applicant:
Central Glass Company, Limited, Ube, JP;
Inventors:
Akiou Kikuchi, Ube, JP;
Yuta Takeda, Ube, JP;
Masakiyo Nagatomo, Higashiomi, JP;
Akifumi Yao, Ube, JP;
Assignee:
CENTRAL GLASS COMPANY, LIMITED, Ube, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01G 41/04 (2006.01);
U.S. Cl.
CPC ...
C01G 41/04 (2013.01);
Abstract
A production method of tungsten hexafluoride according to one embodiment of the present invention includes: a first step of bringing tungsten having an oxide film into contact with a fluorine gas or inert gas containing 50 vol ppm to 50 vol % of hydrogen fluoride in a reactor, thereby removing the oxide film from the tungsten; and a second step of bringing the tungsten from which the oxide film has been removed by the first step into contact with a fluorine-containing gas to form tungsten hexafluoride.