The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Jul. 11, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Tsutomu Terao, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A processing apparatus includes a first structure supported by a vibration reduction mechanism, a drive mechanism supported by the first structure and configured to drive an object to be processed, a second structure supported by the first structure and facing the object, an actuator configured to apply a force to the first structure, a sensor configured to detect a vibration of the second structure, and a controller configured to feedforward-control the actuator based on feedforward control information so as to reduce vibrations of the first structure and the second structure. The feedforward control information includes first control information determined in advance based on an output from the sensor.