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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12140864 B1

PDFFull Text
Date of Patent:
Nov. 12, 2024

Filed:

Feb. 09, 2020

Large area seamless master and imprint stamp manufacturing method

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Manivannan Thothadri, Mountain View, CA (US);

Kevin Laughton Cunningham, Belmont, CA (US);

Arvinder Chadha, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Galen H Hauth

Assistant Examiner:

Lawrence D Hohenbrink, Jr

Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 35/02 (2006.01); B29C 59/02 (2006.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0015 (2013.01); B29C 35/02 (2013.01); B29C 59/026 (2013.01); B82Y 40/00 (2013.01); B29C 59/02 (2013.01); B82Y 10/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/0035 (2013.01);
Abstract

Embodiments of the present disclosure generally relate to pattern replication, imprint lithography, and more particularly to methods and apparatuses for creating a large area imprint without a seam. Methods disclosed herein generally include filling seams between pairs of masters with a filler material such that the seams are flush with a surface of the masters having a plurality of features disposed thereon.

Find Patent Forward Citations

Thothadri, Manivannan. (2024). Large area seamless master and imprint stamp manufacturing method (U.S. Patent No. 12140864). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12140864

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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