The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Jun. 14, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seoul National University R&db Foundation, Seoul, KR;
Ajou University Industry-academic Cooperation Foundation, Suwon-si, KR;
Jangwoo You, Suwon-si, KR;
Yongmin Park, Seoul, KR;
Jesung Koh, Suwon-si, KR;
Changkun Lee, Suwon-si, KR;
Sunpil Jeong, Suwon-si, KR;
Kyujin Cho, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul, KR;
AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Suwon-si, KR;
Abstract
A multi-degree of freedom (DOF) moving stage includes a plurality of joint portions. At least one of the plurality of joint portions has a joint structure including a first flexible member and first and second rigid members, the first and second rigid members being arranged apart from each other with a first gap therebetween such that the first gap exposes a first surface of the first flexible member. Castellated patterns having shapes complementary to each other are respectively provided at a first end portion of the first rigid member adjacent to the first gap and a second end portion of the second rigid member adjacent to the first gap.