The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Aug. 16, 2019
Applicant:
Life Technologies Corporation, Carlsbad, CA (US);
Inventors:
Assignee:
LIFE TECHNOLOGIES CORPORATION, Carlsbad, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/414 (2006.01); H01L 21/28 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
G01N 27/414 (2013.01); H01L 21/28185 (2013.01); H01L 21/28194 (2013.01); H01L 21/3065 (2013.01);
Abstract
A method for manufacturing a sensor includes etching an insulator layer disposed over a substrate to define an opening exposing a sensor surface of a sensor disposed on the substrate, a native oxide forming on the sensor surface; sputtering the sensor surface with a noble gas to at least partially remove the native oxide from the sensor surface; and annealing the sensor surface in a hydrogen atmosphere.