The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Feb. 27, 2018
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Sumito Nakano, Kitamoto, JP;
Makoto Kondo, Fujisawa, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/14 (2006.01); G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01B 11/2416 (2013.01); G01B 11/2518 (2013.01); G01B 11/254 (2013.01); G01B 11/14 (2013.01);
Abstract
A measurement condition that enables accurate shape measurement can be set easily. An image analysis device includes an image analyzerconfigured to detect, in a case of capturing an image of light projected onto an object to be measured, an improper image for shape measurement of the object to be measured, on the basis of design information on the object to be measured, and a measurement condition, and an output unitconfigured to output detection result information that is information based on a detection result of the image analyzer