The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Mar. 05, 2021
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Kakeru Takahashi, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 39/06 (2006.01); F04B 37/08 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01); F04B 39/064 (2013.01);
Abstract
A cryopump includes: a cryopump housing having a cryopump intake port; a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature; and a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through a thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.