The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Mar. 10, 2020
Applicant:
Nissin Electric Co., Ltd., Kyoto, JP;
Inventors:
Yasunori Ando, Kyoto, JP;
Daisuke Matsuo, Kyoto, JP;
Assignee:
NISSIN ELECTRIC CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3211 (2013.01);
Abstract
According to the present invention, provided is an antenna mechanismthat adjusts the impedance of an antenna body through which a high-frequency current flows to generate plasma by means of a simple configuration, and generates plasma P, and comprises: the antenna bodythrough which high-frequency current flows; and one or a plurality of adjustment circuitsprovided adjacent to the antenna body. The adjustment circuithas a metal conductorforming a closed circuit and a capacitorforming the closed circuit.