The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Jul. 08, 2019
Beihang University, Haidian District, CN;
Tiantong Xu, Haidian District, CN;
Zhi Tao, Haidian District Beijing, CN;
Haiwang Li, Haidian District, CN;
Jiamian Sun, Haidian District, CN;
Hanxiao Wu, Haidian District, CN;
Kaiyun Zhu, Haidian District, CN;
Yanxin Zhai, Haidian District, CN;
Xiaoda Cao, Haidian District, CN;
Wenbin Wang, Haidian District, CN;
Weidong Fang, Haidian District, CN;
BEIHANG UNIVERSITY, Beijing, CN;
Abstract
Embodiments of the present application provides a MEMS solenoid inductor, including: a silicon substrate, a soft magnetic core, and a solenoid; wherein the soft magnetic core is wrapped inside the silicon substrate, the silicon substrate is provided with a spiral channel, the soft magnetic core passes through a center of the spiral channel, and the solenoid is disposed in the spiral channel. By disposing the soft magnetic core and the solenoid of the inductor inside the silicon substrate completely, the thickness of the silicon substrate is fully utilized, and the obtained inductor has a larger winding cross-sectional area and improved magnetic flux, which increases the inductance value of the inductor; at the same time, the silicon substrate plays a protective role on the soft magnetic core and the solenoid, the strength of the inductor is improved, and the good impact resistance is provided.