The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2024

Filed:

Jan. 25, 2023
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Christlyn Faith Arias, Mabalacat, PH;

Jeffrey Solas, Iloilo, PH;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/495 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); H01L 21/4825 (2013.01); H01L 21/565 (2013.01); H01L 23/3157 (2013.01); H01L 23/4952 (2013.01); H01L 23/562 (2013.01); H01L 23/564 (2013.01);
Abstract

A semiconductor device includes a semiconductor die having a surface and sensing circuitry at a sensing region of the surface. A tubular wall of a metal material has an inner sidewall around the sensing region to provide a sensing cavity that extends from the surface of the semiconductor die to an opening at a distal edge thereof. The tubular wall includes a proximal portion and a distal flange portion. The proximal portion extends longitudinally from the surface. The distal flange portion extends radially outwardly from the proximal portion a first distance and radially inwardly from the proximal portion a second distance that is less than the first distance.


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