The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2024

Filed:

Oct. 01, 2021
Applicants:

Research & Business Foundation Sungkyunkwan University, Suwon-si, KR;

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Choelmin Jang, Yongin-si, KR;

Sungmin Cho, Gunpo-si, KR;

Ho Kyoon Chung, Yongin-si, KR;

Heeyeop Chae, Anyang-si, KR;

Sang Joon Seo, Seoul, KR;

Seung Woo Seo, Hwaseong-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); C23C 28/00 (2006.01); H10K 30/88 (2023.01); H10K 50/844 (2023.01);
U.S. Cl.
CPC ...
C23C 16/44 (2013.01); C23C 16/45519 (2013.01); C23C 16/45548 (2013.01); C23C 16/54 (2013.01); C23C 28/00 (2013.01); C23C 28/42 (2013.01); H10K 30/88 (2023.02); H10K 50/8445 (2023.02); Y02E 10/549 (2013.01); Y10T 428/269 (2015.01); Y10T 428/31663 (2015.04); Y10T 428/31855 (2015.04); Y10T 428/31935 (2015.04);
Abstract

A multilayer encapsulation thin-film and a method and apparatus for preparing a multilayer encapsulation thin-film are provided. The multilayer encapsulation thin-film includes an inorganic thin film that includes a metal oxide, and an organic thin film that includes a polymer and is formed on the inorganic thin film, where the inorganic thin film and the organic thin film are alternately stacked in multiple layers.


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