The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2024

Filed:

Jul. 20, 2018
Applicant:

Sumitomo Metal Mining Co., Ltd., Tokyo, JP;

Inventors:

Keiichi Sato, Tokyo, JP;

Isao Ando, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 29/32 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C30B 29/22 (2006.01); C03C 17/245 (2006.01);
U.S. Cl.
CPC ...
C23C 14/34 (2013.01); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/5806 (2013.01); C30B 29/22 (2013.01); C30B 29/32 (2013.01); C03C 17/245 (2013.01);
Abstract

A cesium tungsten oxide film has high heat ray shielding performance and a radio wave transmissivity, and a method for manufacturing a cesium tungsten oxide film capable of manufacturing such film by a dry method. A cesium tungsten oxide film including cesium, tungsten and oxygen as main components, wherein, an atomic ratio of the cesium and the tungsten is Cs/W, which is 0.1 or more and 0.5 or less, and the cesium tungsten oxide film is having a hexagonal crystal structure. A method for manufacturing a cesium tungsten oxide film including cesium, tungsten and oxygen as main components, including: a film deposition process using a cesium tungsten oxide target; and a heat treatment process for heat-treating the film at a temperature of 400° C. or more and less than 1000° C., wherein either the film deposition process or the heat treatment process is performed in an atmosphere containing oxygen.


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