Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device

Abstract

A type, size, and location of a crystal defect of an epitaxial layer of a semiconductor wafer containing silicon carbide are detected from a PL image by crystal defect inspection equipment. Detected crystal defects include a triangular polymorph stacking fault generated in the epitaxial layer during epitaxial growth and high-density BPDs extending from the stacking fault and present bundled between the stacking fault and a perfect crystal. Next, a chip region free of the triangular polymorph stacking fault and free of the high-density BPD in a specified area that is in the termination region and is located closer to a chip center than is a specified position is identified as a conforming product. A semiconductor chip set as a conforming product may contain high-density BPDs outside the specified area.