The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12131930 B1

Date of Patent:

Oct. 29, 2024

Filed:

Mar. 02, 2021

Inspection system

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Asaf Schlezinger, Modi'in, IL;

Markus J. Stopper, Voerstetten, DE;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Mark A Deuble

Int. Cl.

CPC ...

H01L 21/67 (2006.01); B65G 15/12 (2006.01); B65G 47/64 (2006.01); B65G 49/06 (2006.01); H01L 21/677 (2006.01);

U.S. Cl.

CPC ...

H01L 21/67288 (2013.01); B65G 15/12 (2013.01); B65G 47/647 (2013.01); B65G 49/067 (2013.01); H01L 21/67271 (2013.01); H01L 21/67706 (2013.01); H01L 21/67715 (2013.01); H01L 21/67718 (2013.01);

Abstract

Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and a second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.

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