The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Mar. 31, 2022
Tong Ji University, Shanghai, CN;
Li Li, Shanghai, CN;
Kuo-Yi Lin, Shanghai, CN;
Jie Chen, Shanghai, CN;
Yiguang Hong, Shanghai, CN;
Qingyun Yu, Shanghai, CN;
Peng Yi, Shanghai, CN;
Jinlong Lei, Shanghai, CN;
Xiouxian Li, Shanghai, CN;
Min Meng, Shanghai, CN;
TONG JI UNIVERSITY, Shanghai, CN;
Abstract
A dynamic dispatching method for semiconductor manufacturing system relates to a dynamic dispatching rule based on self-organization for dispatching in a semiconductor manufacturing system, including S1: setting roles and parameters of self-organization units, and defining key nodes in a production environment; S2: constructing a negotiation mechanism between the self-organization units, and designing a decision-making and dispatching subject ESOU; S3: according to a decision instruction of the ESOU, designing a LSOU allocation dispatching unit for distinguishing single-batch processing and multi-batch processing; and S4: designing a dispatching mechanism based on the self-organization units to implement dynamic semiconductor dispatching. The dynamic dispatching method includes three aspects: role definitions of self-organization units, a negotiation mechanism between the self-organization units and a decision-making method thereof. The simulation based on a real industry benchmark production line shows that the method improves the work movement, throughput and on-time delivery rate by 4.9%, 9.06% and 20.23%.