The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2024

Filed:

Apr. 03, 2020
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Masaya Yoshida, Kobe, JP;

Shinya Kitano, Kobe, JP;

Hiroyuki Okada, Kobe, JP;

Ippei Shimizu, Kobe, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01B 11/25 (2006.01); G05B 19/421 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01); B25J 19/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); G01B 11/2518 (2013.01); G05B 19/421 (2013.01); H01L 21/68707 (2013.01); B25J 11/0095 (2013.01); B25J 19/021 (2013.01);
Abstract

A substrate mapping devicemaps a plurality of substratesinside a container where the substratesare accommodated so as to be arrayed in a given arrayed direction. The substrate mapping deviceincludes a sensorconfigured to detect a state of the substrate, a manipulatorconfigured to move the sensor, and a control deviceconfigured to control the manipulatorto move the sensoralong a mapping course. The control devicesets a first mapping position and a second mapping position different in the position in the arrayed direction of the substratesfrom the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.


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