The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Feb. 08, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Sang Min Lee, Seoul, KR;
Seung Hoon Oh, Cheonan-si, KR;
Yong Joon Im, Yongin-si, KR;
Hyo Won Yang, Seoul, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/04 (2006.01); F26B 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67028 (2013.01); H01L 21/67023 (2013.01); B08B 3/04 (2013.01); F26B 5/005 (2013.01); H01L 21/6719 (2013.01);
Abstract
A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.