The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2024

Filed:

Jul. 31, 2023
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Hayato Hoshino, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H02P 25/064 (2016.01);
U.S. Cl.
CPC ...
G03F 7/70758 (2013.01); G03F 7/70716 (2013.01); H02P 25/064 (2016.02);
Abstract

The present invention provides a control method of a driving apparatus that repeatedly performs a process of driving a target object in a predetermined range by a linear motor, wherein the linear motor includes a stator in which a plurality of coils are arrayed, and a mover provided with the target object, the control method comprising: changing a position of the stator with respect to the predetermined range at an arbitrary timing; and determining, in accordance with the changed position of the stator, output ratios of the plurality of coils in the process.


Find Patent Forward Citations

Hoshino, Hayato. (2024). Control method of driving apparatus, driving apparatus, lithography apparatus, and method of manufacturing article (U.S. Patent No. 12130560). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12130560

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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