The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Jul. 27, 2022
Aac Kaitai Technologies (Wuhan) Co., Ltd, Hubei, CN;
Zhao Ma, Shenzhen, CN;
Zhan Zhan, Shenzhen, CN;
Xiao Kan, Shenzhen, CN;
Shan Yang, Shenzhen, CN;
Shitao Yan, Shenzhen, CN;
Hongtao Peng, Shenzhen, CN;
Yang Li, Shenzhen, CN;
Kahkeen Lai, Singapore, SG;
Veronica Tan, Singapore, SG;
AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan, CN;
Abstract
A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.