The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Nov. 18, 2019
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Rongguang Liang, Tucson, AZ (US);
Junchao Zhang, Tucson, AZ (US);
Xiaobo Tian, Tucson, AZ (US);
Jianbo Shao, Tucson, AZ (US);
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Abstract
Methods, apparatus and systems for processing interferograms in metrology applications are described. In one example aspect, a method includes obtaining an input phase image based on the interferograms, segmenting the input phase image by classifying the input phase image into multiple regions based on the phase value and a location of each pixel, assigning an integer value to each of the multiple regions, and constructing an output phase image based on the input phase image and the phase offset of each of the multiple regions.