The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Apr. 25, 2022
National Technology & Engineering Solutions of Sandia, Llc, Albuquerque, NM (US);
Paul J. Resnick, Albuquerque, NM (US);
Brian D. Homeijer, Albuquerque, NM (US);
Thomas A. Friedmann, Albuquerque, NM (US);
Katherine M. Musick, Albuquerque, NM (US);
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US);
Abstract
A microelectromechanical systems (MEMS) inertial sensing device having a large proof mass with interlocking tabs is disclosed. The interlocking tabs limit motion of the proof mass when subjected to large inertial forces. The interlocking tabs are formed around the periphery of the proof mass and interact with corresponding interlocking tabs formed in a frame to which the proof mass is tethered. The motion of the proof mass is limited by the interlocking tabs, which are formed during MEMS fabrication of the inertial sensing device rather than as part of the packaging process. With a large proof mass, the inertial sensing device can provide high sensitivity in low inertial force environments while the interlocking tabs protect the device when subjected to high inertial forces.