The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2024

Filed:

Aug. 17, 2016
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Takafumi Ogiwara, Hamamatsu, JP;

Yuta Kondoh, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/08 (2014.01); B23K 26/00 (2014.01); B23K 26/04 (2014.01); B23K 26/0622 (2014.01); B23K 26/53 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0869 (2013.01); B23K 26/0006 (2013.01); B23K 26/04 (2013.01); B23K 26/048 (2013.01); B23K 26/0622 (2015.10); B23K 26/08 (2013.01); B23K 26/53 (2015.10); H01L 21/78 (2013.01);
Abstract

A laser processing method includes: a first step of converging laser light having a wavelength larger than 1064 nm on an object to be processed with a rear face of a silicon substrate as a laser light entrance surface and moving a first converging point of the laser light along a line to cut, and thereby forming a first modified region along the line to cut; and a second step of converging the laser light having a wavelength larger than 1064 nm on the object to be processed with the rear face as the laser light entrance surface after the first step and moving a second converging point of the laser light along the line to cut while offsetting the second converging point with respect to a position where the first converging point is aligned, and there by forming a second modified region along the line to cut.


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