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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12127310 B1

PDFFull Text
Date of Patent:
Oct. 22, 2024

Filed:

Mar. 16, 2022

Multi-zone pedestal heater without vias

Applicant:

Watlow Electric Manufacturing Company, St. Louis, MO (US);

Inventors:

Kevin Ptasienski, O'Fallon, MO (US);

Stanton Hopkins Breitlow, Winona, MN (US);

Mohammad Nosrati, Redwood City, CA (US);

Kevin Smith, Columbia, MO (US);

Brittany Phillips, St. Louis, MO (US);

Ken Ames, San Jose, CA (US);

Patrick Margavio, Columbia, MO (US);

Kurt English, Columbia, MO (US);

Assignee:

Watlow Electric Manufacturing Company, St. Louis, MO (US);

Attorney:

Burris Law, PLLC

Primary Examiner:

Joseph M Pelham

Int. Cl.
CPC ...
H05B 3/28 (2006.01); C23C 16/458 (2006.01); F27B 5/14 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 23/48 (2006.01); H01L 23/485 (2006.01); H01L 23/52 (2006.01); H01L 23/522 (2006.01); H05B 1/02 (2006.01); H05B 3/06 (2006.01);
U.S. Cl.
CPC ...
H05B 3/06 (2013.01); C23C 16/4586 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 23/485 (2013.01); H01L 23/522 (2013.01); H05B 1/0202 (2013.01); H05B 1/0233 (2013.01); H05B 3/28 (2013.01); H05B 2203/005 (2013.01); H05B 2203/007 (2013.01); H05B 2203/014 (2013.01); H05B 2203/016 (2013.01); H05B 2203/035 (2013.01);
Abstract

A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.

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