The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Oct. 21, 2022
Aac Acoustic Technologies (Shenzhen) Co., Ltd., Shenzhen, CN;
Linlin Wang, Shenzhen, CN;
Zhuanzhuan Zhao, Shenzhen, CN;
Kaijie Wang, Shenzhen, CN;
Zhengyu Shi, Shenzhen, CN;
Minh Ngoc Nguyen, Bac Ninh, VN;
Rui Zhang, Shenzhen, CN;
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen, CN;
Abstract
The present invention provides a diaphragm and a MEMS sensor using the diaphragm. The diaphragm is a rectangular diaphragm, and the diaphragm includes a main body of the diaphragm and fixed parts arranged outside the main body of the diaphragm and located at the four corners of the diaphragm. The four corners of the rectangular diaphragm are depressed parts formed by concave in the direction of the diaphragm main body. The fixed part includes at least two fixed anchor points arranged along the edge of the diaphragm forming the depressed part. The present invention improves the effective sensing area of the diaphragm and the acoustic performance of the MEMS sensor.