The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Jun. 25, 2020
Applicant:
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Inventors:
Takuya Matsui, Ibaraki, JP;
Hitoshi Sai, Ibaraki, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0236 (2006.01); H01L 31/075 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02363 (2013.01); H01L 31/075 (2013.01); H01L 31/1804 (2013.01);
Abstract
The present invention realizes a hole-selective film provided with both hole selectivity and passivation characteristics. This production method for a semiconductor device is provided with a step for forming a titanium oxide film on a crystalline silicon layer by means of a thermal atomic layer deposition method, and a step for carrying out a hydrogen plasma process on the titanium oxide film.
Matsui, Takuya. (2024). Semiconductor device and solar cell and production method for semiconductor device (U.S. Patent No. 12125926). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12125926
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile