The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2024

Filed:

Jun. 17, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Tomonari Shioda, Yokkaichi, JP;

Yasunori Oshima, Yokkaichi, JP;

Taichi Iwasaki, Yokkaichi, JP;

Shota Yamagiwa, Yokkaichi, JP;

Hiroto Saito, Yokkaichi, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 27/12 (2006.01); H01L 29/40 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/167 (2006.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 27/1207 (2013.01); H01L 29/401 (2013.01); H01L 29/41766 (2013.01); H01L 29/66636 (2013.01); H01L 29/7848 (2013.01); H01L 29/167 (2013.01); H01L 29/456 (2013.01);
Abstract

A semiconductor device in an embodiment includes a substrate and a transistor. The transistor includes a source layer, a drain layer, a gate insulation film, a gate electrode, a contact plug and a first epitaxial layer. The source layer and the drain layer are provided in surface regions of the substrate, and contain an impurity. The gate insulation film is provided on the substrate between the source layer and the drain layer. The gate electrode is provided on the gate insulation film. The contact plug is provided so as to protrude to the source layer or the drain layer downward of a surface of the substrate. The first epitaxial layer is provided between the contact plug and the source layer or drain layer, and contains both the impurity and carbon.


Find Patent Forward Citations

Loading…