The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Sep. 29, 2021
International Business Machines Corporation, Armonk, NY (US);
Ashim Dutta, Clifton Park, NY (US);
Ekmini Anuja De Silva, Slingerlands, NY (US);
Praveen Joseph, White Plains, NY (US);
Jennifer Church, Albany, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Airgap isolation for back-end-of-the-line interconnect structures includes a dielectric liner formed above a top surface and opposite sidewalls of each of a plurality of metal lines on a substrate, the dielectric liner disposed above a top surface of the substrate not covered by the plurality of metal lines, portions of the dielectric liner located on the opposite sidewalls of each of the plurality of metal lines are separated by a space. A dielectric cap is disposed above an uppermost surface of portions of the dielectric liner above each of the plurality of metal lines and above the space, the dielectric cap pinches-off the space between portions of the dielectric liner located on the opposite sidewalls of each of the plurality of metal lines for providing airgaps between adjacent metal lines.