The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Apr. 10, 2020
Applicant:
Morgan Advanced Ceramics, Inc., Hayward, CA (US);
Inventor:
Chengtsin Lee, Hayward, CA (US);
Assignee:
Morgan Advanced Ceramics, Inc., Hayward, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C04B 35/486 (2006.01); C04B 35/505 (2006.01); C04B 35/565 (2006.01); C04B 35/581 (2006.01); C04B 35/584 (2006.01); C04B 35/645 (2006.01); C04B 37/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C04B 35/486 (2013.01); C04B 35/505 (2013.01); C04B 35/565 (2013.01); C04B 35/581 (2013.01); C04B 35/584 (2013.01); C04B 35/645 (2013.01); C04B 37/006 (2013.01); C04B 2235/77 (2013.01); C04B 2235/96 (2013.01); C04B 2237/122 (2013.01); C04B 2237/346 (2013.01); C04B 2237/348 (2013.01); C04B 2237/365 (2013.01); C04B 2237/366 (2013.01); C04B 2237/368 (2013.01); C04B 2237/68 (2013.01);
Abstract
A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % alumina, titania, ZrO, YO, AlN, SiN, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (TaO).