The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Aug. 27, 2019
Applicant:
Kyocera Corporation, Kyoto, JP;
Inventor:
Hiroshi Ono, Kirishima, JP;
Assignee:
KYOCERA Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/68757 (2013.01);
Abstract
An electrostatic chuck of the disclosure includes a ceramic base in plate form, and an electrostatic attraction electrode. The ceramic base includes a plurality of particles containing aluminum oxide as a main component. The plurality of particles contain magnesium atoms and zirconium atoms.
Ono, Hiroshi. (2024). Electrostatic chuck and method for manufacturing electrostatic chuck (U.S. Patent No. 12125731). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12125731
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile