The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Nov. 23, 2021
Semes Co., Ltd., Chungcheongnam-do, KR;
Ki Sang Eum, Chungcheongnam-do, KR;
Jin Ho Choi, Incheon, KR;
Byoung Doo Choi, Chungcheongnam-do, KR;
Seung Han Lee, Chungcheongnam-do, KR;
Sun Wook Jung, Gyeonggi-do, KR;
Si Eun Kim, Chungcheongbuk-do, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
An apparatus for treating a substrate, the apparatus comprising: a processing container having an inner space; a support unit having a support plate configured to support and rotate the substrate in the inner space; a liquid supply unit supplying treating liquid to the substrate supported by the support unit; and an exhaust unit exhausting an air flow in the inner space, wherein the processing container includes a bottom wall and a side wall extending from the outside end of the bottom wall, the processing container including a first gas-liquid separator provided at the side wall.