The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Dec. 25, 2019
Jsw Afty Corporation, Tokyo, JP;
Hironori Torii, Tokyo, JP;
Kouji Kageyama, Tokyo, JP;
JSW AFTY CORPORATION, Tokyo, JP;
Abstract
An object is to extend the life of the target member. The target (TA) is designed to have a symmetrical structure so as to realize an invertible configuration. According to this, even if the consumption of the target member () is large on the side closer to the plasma generation unit where the plasma density is high, the portion of the target member () which has been located on the side closer to the film formation object where the plasma density is low and is thus consumed less can be rearranged on the side closer to the plasma generation unit where the plasma density is high, by inverting the target (TA).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile