The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Dec. 21, 2022
Daihen Corporation, Osaka, JP;
DAIHEN CORPORATION, Osaka, JP;
Abstract
A high-frequency power supply apparatus includes the following elements. A first power supply outputs a first high-frequency voltage with a first fundamental frequency. A second power supply outputs a second high-frequency voltage with a second fundamental frequency lower than the first fundamental frequency. A second matching device is connected between the second power supply and the load. The second matching device generates a timing control signal with a frequency lower than the second fundamental frequency. The first power supply generates a modulation signal by applying a start phase and a frequency shift amount to a modulation fundamental wave signal whose frequency is equal to the second fundamental frequency. The start phase is applied to the modulation fundamental wave signal in accordance with an input timing of the timing control signal. The first power supply performs frequency modulation on the first high-frequency voltage by using the modulation signal.