The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2024

Filed:

Jul. 26, 2022
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Kenta Sato, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01L 1/10 (2006.01); G01P 1/02 (2006.01); G01P 15/097 (2006.01); G01P 15/135 (2006.01); G01P 15/18 (2013.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01P 1/023 (2013.01); G01P 15/097 (2013.01); G01P 15/135 (2013.01); G01P 15/18 (2013.01); G01L 1/106 (2013.01);
Abstract

A physical quantity sensor includes: a base portion; a first arm portion, a second arm portion, and a third arm portion that are coupled to the base portion and that are provided with fixing portions; a movable portion disposed between the first arm portion and the second arm portion and between the first arm portion and the third arm portion in a plan view; a constricted portion that is disposed between the base portion and the movable portion, and that couples the base portion and the movable portion; and a physical quantity detection element that is disposed across the constricted portion in the plan view and that is attached to the base portion and the movable portion. Thin portions are formed at least at two positions in at least one of the second arm portion and the third arm portion.


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