The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Feb. 28, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventor:
Hossein Sadeghi, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/06 (2006.01); G01B 17/02 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
G01B 17/02 (2013.01); G01B 5/061 (2013.01); H01J 37/32642 (2013.01); H01J 37/3299 (2013.01);
Abstract
A measurement system to measure at least one of a height and a thickness of an edge ring in a plasma processing chamber includes an ultrasound transducer configured to output an ultrasound signal into the edge ring and to receive a reflected signal from the edge ring. A controller is configured to cause the ultrasound transducer to generate the ultrasound signal and to determine a thickness of the edge ring based on timing of the ultrasound signal and the reflected signal.