The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
May. 21, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Manoj Kumar Dayyala, Newark, CA (US);
Jorge Pablo Fernandez, Saratoga, CA (US);
Kourosh Nafisi, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 15/04 (2006.01); G03F 7/00 (2006.01); G06T 7/00 (2017.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01B 15/04 (2013.01); G03F 7/70625 (2013.01); G06T 7/001 (2013.01); G01B 2210/56 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); H01L 22/12 (2013.01);
Abstract
Disclosed herein are methods and systems for analyzing a cross-sectional feature of a structural element on a semiconductor wafer to determine whether an isolated or a systemic failure to reach preselected parameters occurred.