The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2024

Filed:

Oct. 25, 2017
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Masayuki Shiraishi, Kumagaya, JP;

Shigeki Egami, Tokyo, JP;

Yoshio Kawabe, Kumagaya, JP;

Yosuke Tatsuzaki, Kumagaya, JP;

Yuichi Shibazaki, Kumagaya, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/04 (2014.01);
U.S. Cl.
CPC ...
B23K 26/04 (2013.01);
Abstract

A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.


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