The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2024

Filed:

Jun. 15, 2022
Applicant:

Kv Materials Co., Ltd., Gyeongbuk, KR;

Inventors:

Shinhyuk Kang, Seoul, KR;

Jeonghyun Moon, Daegu, KR;

Kangmin Ok, Gyeongsangbuk-do, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02631 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01); H01L 21/02565 (2013.01); H01L 29/7869 (2013.01); C23C 14/3407 (2013.01);
Abstract

An oxide semiconductor sputtering target used in a sputtering process to deposit an active layer of a TFT. The oxide semiconductor sputtering target is formed from a material based on a composition of In, Sn, Ga, Zn, and O. The material contains gallium oxide, tin oxide, zinc oxide, and indium oxide. The In, Sn, Ga, and Zn contents are in ranges of 60% to 80%, 0.5% to 8%, 5% to 15%, and 10% to 30% by weight with respect to the weight of In+Sn+Ga+Zn, respectively. A method of fabricating a TFT includes depositing an active layer using the oxide semiconductor sputtering target. Such a TFT is used in a liquid crystal display (LCD), an organic light-emitting display, an electroluminescence display, and the like.


Find Patent Forward Citations

Kang, Shinhyuk. (2024). Oxide semiconductor sputtering target and method of fabricating thin-film transistor using same (U.S. Patent No. 12119225). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12119225

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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