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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12119217 B1

PDFFull Text
Date of Patent:
Oct. 15, 2024

Filed:

Mar. 10, 2023

Substrate treatment method and substrate treatment apparatus

Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventors:

Si Nae Song, Chungcheongnam-do, KR;

Sung Bum Park, Chungcheongnam-do, KR;

Ho Jin Jeong, Chungcheongnam-do, KR;

Dong Ho Lim, Chungcheongnam-do, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-Do, KR;

Attorney:

Carter, DeLuca & Farrell LLP

Primary Examiner:

Eric W Golightly

Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B08B 13/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B08B 3/022 (2013.01); B08B 3/08 (2013.01); B08B 13/00 (2013.01); H01L 21/67051 (2013.01); H01L 21/68764 (2013.01);
Abstract

A substrate treatment method includes an auto-recovery operation of automatically recovering a substrate when a treatment process of treating the substrate is interrupted due to an occurrence of an abnormality and a chamber neutralization operation of neutralizing an inside of a process chamber including the substrate before the auto-recovery operation after the treatment process is stopped.

Find Patent Forward Citations

Song, Si. (2024). Substrate treatment method and substrate treatment apparatus (U.S. Patent No. 12119217). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12119217

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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