The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Jan. 20, 2021
Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, CN;
Abstract
The present disclosure discloses a power device including at least one vacuum packaged unit structure. The unit structure comprises a silicon substrate () and an emitter (), a light modulator () and a collector () formed on the silicon substrate (). On the one hand, the unified silicon-based process is compatible with the existing commercial process, so that it is easy for integration, simple for manufacture, and low in cost; on the other hand, the light modulator () is introduced and formed on the silicon substrate by a silicon-based process, which enhances field emission efficiency of the emitter (), offsets the inconsistency of distances between the tips of the emitters () and the collector () caused by unevenness of the emitters, and increases the process redundancy of the cold cathode emitter.